This paper addresses the industrial demand for precision and efficiency in metal surface defect detection by proposing SLF-YOLO, a lightweight object detection model designed for resource-constrained ...

Due to the polycrystalline cubic boron nitride tool has the characteristics of high hardness, brittleness, etc., it is easy to break the tool or produce defects in the laser cutting process, which ...

Detecting sub-5nm defects creates huge challenges for chipmakers, challenges that have a direct impact on yield, reliability, and profitability. In addition to being smaller and harder to detect, ...

“Semiconductor lithography inspection requires reliable detection of small pattern defects such as bridge, burr, pinch, and contamination. In this study, we propose a two-stage vision-language ...